Effect of AR plus ion beam irradiation in the process of plasma surface modification of polymer films.

被引:0
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作者
Hyun, J
Yoo, S
Aspnes, DE
Cuomo, JJ
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
64-COLL
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页码:U417 / U417
页数:1
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