A Correction Method on System Error in Null mirror During Interferometric Testing

被引：0
|
作者：
Chen, Xi [1 ,2 ]
Guo, Peiji [1 ,2 ]
Wang, Wei [1 ,2 ]
机构：
[1] Soochow Univ, Sch Optoelect Sci & Engn, Key Lab Adv Opt Mfg Technol Jiangsu Prov, Suzhou 215006, Jiangsu, Peoples R China
[2] Soochow Univ, Key Lab Modern Opt Technol Educ, Educ Minist China, Suzhou 215006, Jiangsu, Peoples R China
来源：
9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2019年 / 10838卷
关键词：
optical test; system error of interferometer; Zernike polynomials;
D O I：
10.1117/12.2505008
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The causes of the system error in null mirror during interferometric testing was analyzed. The system error in null mirror were obtained by turning the tested surface in different angles along their optic axis. The corrective file was loaded into the interferometer measurement, so as to the system error can be removed directly when testing. Therefore, with this technique, the demands on the material, manufacturing, and assembly of null mirror is not so critical, and the test accuracy is improved observably.
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页数：6
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