Influence of Deep-Level Traps on the Breakdown Characteristics of AlGaN/GaN High Electron Mobility Transistors

被引:3
|
作者
Zhao, Ziqi [1 ]
Du, Jiangfeng [1 ]
Yu, Qi [1 ]
Yang, Mohua [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
AlGaN/GaN HEMTs; Deep-Level Traps; Breakdown Voltage; ON-State Resistance; CHEMICAL-VAPOR-DEPOSITION; GAN; GROWTH;
D O I
10.1166/nnl.2012.1414
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, we investigate the influence of the deep-level traps in the GaN buffer layer on the breakdown characteristics of AlGaN/GaN high electron mobility transistors. The deep-level traps are assumed to be acceptor type with single peak distribution in energy. The leakage current through the GaN buffer layer is effectively suppressed with the presence of deep-level traps in the buffer region. Moreover, the traps charged with electrons further improve the uniformity of the electric field along the channel. The breakdown strength of the devices is dramatically enhanced by the above two factors. With trap density increasing from 1 x 10(15) cm(-3) to 5 x 10(16) cm(-3), the breakdown voltage of AlGaN/GaN HEMTs is significantly improved from 10 V to 1351 V with 5 mu m gate-drain spacing, while negligible negative impact on ON-state resistance is observed.
引用
收藏
页码:790 / 793
页数:4
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