Optical Interrogation of a Pressure Sensor Fabricated Using MEMS Technology

被引：0
|
作者：
Dhingra, Bhawna [1 ]
Thyagarajan, K. [1 ]
Chandra, Sudhir [2 ]
Tiwari, Ruchi [2 ]
机构：
[1] Indian Inst Technol Delhi, Dept Phys, Delhi, India
[2] Indian Inst Technol Delhi, Ctr Appl Res Elect, Delhi, India
来源：
16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES | 2012年 / 8549卷
关键词：
Micro-electro mechanical systems (MEMS); Fabry-Perot (FP) cavity; Single mode fiber (SMF); Multimode fiber (MMF);
D O I：
10.1117/12.927410
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
An optical MEMS (micro-electromechanical system) pressure sensor fabricated using bulk silicon micromachining techniques and tested using single wavelength interrogation technique is presented here. The sensor described here was designed for low pressure range applications. The operating principle of the sensor is Fabry-Perot (FP) interference. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, low hysteresis and a very good repeatability. Sensor's response was found to be comparable with the theoretical predictions[3].
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页数：8
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