共 50 条
- [23] Polarization-induced curvature of a laser damage channel Technical Physics Letters, 1997, 23 : 412 - 413
- [25] Polarization-induced astigmatism caused by topographic masks EMLC 2008: 24TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2008, 6792 : XXIX - XLIII
- [27] Polarization-induced astigmatism caused by topographic masks PHOTOMASK TECHNOLOGY 2007, PTS 1-3, 2007, 6730