Absolute distance measurement using frequency-sweeping heterodyne interferometer calibrated by an optical frequency comb

被引:71
|
作者
Wu, Xuejian [1 ]
Wei, Haoyun [1 ]
Zhang, Hongyuan [1 ]
Ren, Libing [1 ]
Li, Yan [1 ]
Zhang, Jitao [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
LASER INTERFEROMETRY; METROLOGY;
D O I
10.1364/AO.52.002042
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a frequency-sweeping heterodyne interferometer to measure an absolute distance based on a frequency-tunable diode laser calibrated by an optical frequency comb (OFC) and an interferometric phase measurement system. The laser frequency-sweeping process is calibrated by the OFC within a range of 200 GHz and an accuracy of 1.3 kHz, which brings about a precise temporal synthetic wavelength of 1.499 mm. The interferometric phase measurement system consisting of the analog signal processing circuit and the digital phase meter achieves a phase difference resolution better than 0.1 deg. As the laser frequency is sweeping, the absolute distance can be determined by measuring the phase difference variation of the interference signals. In the laboratory condition, our experimental scheme realizes micrometer accuracy over meter distance. (C) 2013 Optical Society of America
引用
收藏
页码:2042 / 2048
页数:7
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