Consequent use of IT Tools as a driver for Cost Reduction and Quality Improvements

被引：0
|
作者：
Hein, Stefan [1 ]
Rapp, Roberto [1 ]
Feustel, Andreas [1 ]
机构：
[1] Robert Bosch GmbH, D-72762 Reutlingen, Germany
来源：
29TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE | 2013年 / 8886卷
关键词：
D O I：
10.1117/12.2031399
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The semiconductor industry drives a lot of efforts in the field of cost reductions and quality improvements. The consequent use of IT tools is one possibility to support these goals. With the extensions of its 150mm Fab to 200mm Robert Bosch increased the systematic use of data analysis and Advanced Process Control (APC).
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页数：7
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