Polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes

被引：6
|
作者：
Johansson, A [1 ]
Calleja, M [1 ]
Dimaki, MI [1 ]
Rasmussen, P [1 ]
Boggild, P [1 ]
Boisen, A [1 ]
机构：
[1] Tech Univ Denmark, Dept Micro & Nanotechnol, MIC, DK-2800 Lyngby, Denmark
来源：
SENSOR LETTERS | 2004年 / 2卷 / 02期
关键词：
polymer cantilever; SU-8; carbon nanotubes; dielectrophoresis; biosensor;
D O I：
10.1166/sl.2004.036
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A polymer cantilever platform for dielectrophoretic assembly of carbon nanotubes has been designed and realized. Multi-walled carbon nanotubes from aqueous solution have been assembled between two metal electrodes that are separated by 2 mu m and embedded in the polymer cantilever. The entire chip, except for the metallic electrodes and wiring, was fabricated in the photoresist SU-8. SU-8 allows for an inexpensive, flexible and fast fabrication method, and the cantilever platform provides a hydrophobic surface that should be well suited for nanotube assembly. The device can be integrated in a micro-total analysis system and has the potential to be used as a scanning sensor for biochemical applications.
引用
收藏
页码：117 / 120
页数：4
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