Utilizing Energy Localization in Weakly Coupled Nonlinear Resonators for Sensing Applications

被引：25

作者：

Pandit, Milind ^{[1
]}

Zhao, Chun ^{[1
]}

Sobreviela, Guillermo ^{[1
]}

Du, Sijun ^{[1
]}

Zou, Xudong ^{[2
]}

Seshia, Ashwin ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Nanosci Ctr, Cambridge CB3 0FF, England

[2] Chinese Acad Sci, Inst Elect, Beijing 100190, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2019年 / 28卷 / 02期

基金：

英国自然环境研究理事会; 英国工程与自然科学研究理事会;

关键词：

Resonators; mode localization; nonlinearities; bifurcation; MODE LOCALIZATION; NOISE-REDUCTION;

D O I：

10.1109/JMEMS.2019.2894953

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, energy localization within weakly coupled nonlinear MEMS resonators has been utilized for sensing applications. The sensitivity and the noise floor of the weakly coupled resonators operating beyond the critical amplitude have been characterized at the boundaries of the unstable branch, termed as bifurcation points in this paper. The measurement results show that such measurements can provide beneficial gains in resolution when compared with linear operation, despite the reduced sensitivity at the top bifurcation point. A minimum input-referred noise floor of 18 ppb/Hz(1/2) has been achieved through this sensing scheme which is a 40% betterment in comparison to its linear counterpart.

引用

页码：182 / 188

页数：7

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