Design, fabrication and testing of micro-optical components for sensors and microsystems

被引：0
|
作者：
Volkel, R
Nussbaum, P
Roulet, JC
Blattner, P
Weible, KJ
Herzig, HP
机构：
来源：
MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS | 1997年 / 3099卷
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on our activities in the design, fabrication, characterization and system integration of planar micro-optical elements. Microlens arrays, gratings, diffusers, beam shapers and beam splitters have been fabricated, tested and integrated in chemical analysis systems (mu TAS, fluorescence detection), tracking sensors for satellites, displacement sensors, optical lightpipes, LCD projector illumination, photospectrometers, neural networks and multiple channel imaging systems for photolithography. Packaging and alignment strategies for sensors and optical microsystems were investigated.
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页码：196 / 211
页数：16
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