Fabrication of micro-optical components using femtosecond oscillator pulses

被引:0
|
作者
Rodrigues, Vanessa R. M. [1 ]
Ramachandran, Hema [1 ,2 ]
Chidangil, Santhosh [1 ]
Mathur, Deepak [1 ,3 ]
机构
[1] Manipal Univ, Dept Atom & Mol Phys, Manipal 576104, Karnataka, India
[2] Raman Res Inst, Bangalore 560080, Karnataka, India
[3] Tata Inst Fundamental Res, Homi Bhabha Rd, Mumbai 400005, Maharashtra, India
关键词
laser direct writing; diffractive optics; femtosecond oscillator; micromachining;
D O I
10.1117/12.2270898
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With a penchant for integrated photonics and miniaturization, the fabrication of micron sized optical elements using precision laser pulse management is drawing attention due to the possibility of minimizing tolerances for collateral material damage. The work presented here deals with the design, fabrication and characterization of a range of diffractive optics - gratings, grids and Fresnel zone plates - on transparent and metallic samples. Their low volume, light weight, transmission bandwidth, high damage threshold and flexible design make them suited for replacing conventional refractive optical elements. Our one-step, mask-less, 3-D laser direct writing process is a green fabrication technique which is in stark contrast to currently popular Photo-lithography based micro-structuring. Our method provides scope for modifications on the surface as well as within the bulk of the material. The mechanism involved in the fabrication of these optics on transparent and thin metallic substrates differ from each other. Our studies show that both amplitude and phase versions of micro-structures were achieved successfully with performances bearing similar to 98% accuracy vis-a-vis theoretical expectations.
引用
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页数:6
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