Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

被引:1
|
作者
Wang, Peng [1 ,2 ]
Chu, Wei [3 ]
Li, Xiaolong [3 ]
Lin, Zijie [3 ]
Xu, Jian [3 ]
Zhang, Haisu [3 ]
Cheng, Ya [2 ,3 ]
机构
[1] Tongji Univ, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[3] East China Normal Univ, XXL Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China
来源
基金
中国国家自然科学基金;
关键词
ultrafast laser microfabrication; 3D glass printing; light-field manipulation;
D O I
10.1117/12.2542020
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Femtosecond laser-induced chemical etching (FLICE) has proved itself a powerful approach when attempting to fabricate three-dimensional (3D) microstructures in glass, whereas maintaining a high spatial resolution in fabricating samples of great heights/thicknesses is challenging due to the diffraction nature of light waves. Here, we demonstrate the fabrication of macro-scale 3D glass objects of large heights up to similar to 3.8 cm with a well-balanced lateral and longitudinal resolution of similar to 20 mu m using the FLICE. Moreover, a freeform hand printed with embedded blood vessel system has been produced. The remarkable accomplishments are achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica, which gives rise to depth-insensitive focusing of the laser pulses and polarization-independent selective etching inside fused silica. We examine the difference in the plasma dynamics between interactions of picosecond and femtosecond laser pulses with fused silica glass.
引用
收藏
页数:14
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