A High-Voltage Interface Circuit for MEMS Vibratory Gyroscope

被引：0
|
作者：
Fang, Ran [1 ]
Lu, Wengao [1 ]
Tao, Tingting [1 ]
Wang, Guannan [1 ]
Chen, Zhongjian [1 ]
Zhang, Yacong [1 ]
Yu, Dunshan [1 ]
机构：
[1] Peking Univ, Dept Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
来源：
2012 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID STATE CIRCUIT (EDSSC) | 2012年
关键词：
capacitive sensing circuit; MEMS gyroscope; hight-voltage level shifter; multiple power supplies;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a high-voltage interface circuit has been designed and implemented for MEMS gyroscope. Continuous-time charge sensitive amplifier with chopping stabilization technique is used in the conversion stage to achieve low noise performance. A closed driving loop for MEMS gyroscope which applying multiple supply voltages is presented. The chip is fabricated in a 0.35um 5V/12V high-voltage process. The test of the chip is performed with a MEMS vibratory gyroscope. The result shows that the driving output of the ASIC can ensure a stable oscillation in the driving axis.
引用
收藏
页数：2
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