Magnetic tunnel junction device with perpendicular magnetization films for high-density magnetic random access memory

被引:370
|
作者
Nishimura, N [1 ]
Hirai, T [1 ]
Koganei, A [1 ]
Ikeda, T [1 ]
Okano, K [1 ]
Sekiguchi, Y [1 ]
Osada, Y [1 ]
机构
[1] Canon Inc, Semiconductor Device Dev Ctr, Ohta Ku, Tokyo 1468501, Japan
关键词
D O I
10.1063/1.1459605
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present here a magnetic tunnel junction device using perpendicular magnetization films designed for magnetic random access memory (MRAM). In order to achieve high-density MRAM, magnetic tunnel junction devices with a small area of low aspect ratio (length/width) is required. However, all MRAMs reported so far consist of in-plane magnetization films, which require an aspect ratio of 2 or more in order to reduce magnetization curling at the edge. Meanwhile, a perpendicular magnetic tunnel junction (pMTJ) can achieve an aspect ratio=1 because the low saturation magnetization does not cause magnetization curling. Magnetic-force microscope shows that stable and uniform magnetization states were observed in 0.3 mumx0.3 mum perpendicular magnetization film fabricated by focused-ion beam. In contrast, in-plane magnetization films clearly show the presence of magnetization vortices at 0.5 mumx0.5 mum, which show the impossibility of information storage. The PMTJ shows a magnetoresistive (MR) ratio larger than 50% with a squareness ratio of 1 and no degradation of MR ratio at 10(3) Omega mum(2) ordered junction resistance. (C) 2002 American Institute of Physics.
引用
收藏
页码:5246 / 5249
页数:4
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