Characterisation of an RF atomic nitrogen plasma source

被引：12
|
作者：
Voulot, D
McCullough, RW [1 ]
Thompson, WR
Burns, D
Geddes, J
Cosimini, GJ
Nelson, E
Chow, PP
Klaassen, J
机构：
[1] Queens Univ Belfast, Dept Pure & Appl Phys, Atom & Mol Phys Res Div, Belfast BT7 1NN, Antrim, North Ireland
[2] SVT Associates, Eden Prairie, MN 55344 USA
来源：
JOURNAL OF CRYSTAL GROWTH | 1999年 / 201卷
关键词：
MBE; atom source; radio frequency; nitrogen; dissociation; flux;
D O I：
10.1016/S0022-0248(98)01361-X
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The dissociation fraction and atomic nitrogen flux from an SVTA radio frequency atomic nitrogen source designed for nitrogen doping by MBE have been measured absolutely. Their dependence on source power and pressure conditions has been investigated. Dissociation fractions of up to 40% and atomic fluxes of up to 8 x 10(17) s(-1) were obtained. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：399 / 401
页数：3
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