HTS scanning SQUID microscopy of active circuits

被引：36
|
作者：
Fleet, EF [1 ]
Chatraphorn, S
Wellstood, FC
Knauss, LA
机构：
[1] Univ Maryland, Ctr Superconduct Res, College Pk, MD 20742 USA
[2] Neocera Inc, Beltsville, MD 20705 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1999年 / 9卷 / 02期
关键词：
D O I：
10.1109/77.783928
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have used a high-T(c) scanning SQUID microscope to image semiconductor circuits operating in air at room temperature. Our microscope uses a commercially available 77 K refrigerator to cool a YBa(2)Cu(3)O(7-delta) de SQUID. The system maintains vacuum isolation of the SQUID even when it is separated from a room-temperature sample by about 30 mu m. When operated in this manner, the SQUID has a magnetic field sensitivity of 20 pT/root Hz above 500 Hz. By inverting the magnetic field images to generate two-dimensional current density distributions, we localize current paths to within +/-36 mu m at SQUID-sample separations of 150 mu m, We present images and discuss the spatial resolution obtained with this technique.
引用
收藏
页码：4103 / 4106
页数：4
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