Lattice order in thulium-doped GaN epilayers:: In situ doping versus ion implantation

被引:6
|
作者
Hernández, S
Cuscó, R
Artús, L
Nogales, E
Martin, RW
O'Donnell, KP
Halambalakis, G
Briot, O
Lorenz, K
Alves, E
机构
[1] Univ Strathclyde, Dept Phys, Glasgow G4 0NG, Lanark, Scotland
[2] CSIC, Inst Jaume Almera, E-08028 Barcelona, Spain
[3] Univ Montpellier 2, GES, F-34095 Montpellier, France
[4] ITN, P-2686953 Sacavem, Portugal
关键词
rare earth doping; ion beam implantation; Raman scattering;
D O I
10.1016/j.optmat.2005.09.021
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated the crystalline quality of thulium-doped GaN obtained either by in situ doping during MBE growth or by ion-beam implantation of MOCVD GaN layers. Both types of samples display the typical sharp intra-4f shell emission lines of Tm3+ ions in the blue and infrared spectral regions. The Raman spectra of the MBE samples indicate a good crystalline quality, showing the narrow E-2 and A(1) phonon peaks characteristic of GaN, even for the highest Tin concentrations. In contrast, Raman peaks associated with vacancy-related defects, as well as low-frequency bands due to disorder-activated modes can be observed in the Raman spectra of the implanted samples. These results indicate that, for the implantation doses required to achieve Tm emission, some residual disorder remains in the implanted GaN layers which is not observed in Tm-doped MBE samples with higher Tm concentration. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:771 / 774
页数:4
相关论文
共 50 条
  • [41] In-situ transport and microstructural evolution in GaN Schottky diodes and epilayers exposed to swift heavy ion irradiation
    Kumar, Ashish
    Singh, R.
    Kumar, Parmod
    Singh, Udai B.
    Asokan, K.
    Karaseov, Platon A.
    Titov, Andrei I.
    Kanjilal, D.
    JOURNAL OF APPLIED PHYSICS, 2018, 123 (16)
  • [43] Soft x-ray high order harmonic generation driven by high repetition rate ultrafast thulium-doped fiber lasers
    Gebhardt, Martin
    Heuermann, Tobias
    Wang, Ziyao
    Lenski, Mathias
    Gaida, Christian
    Klas, Robert
    Kirsche, Alexander
    Haedrich, Steffen
    Rothhardt, Jan
    Limpert, Jens
    FIBER LASERS XVII: TECHNOLOGY AND SYSTEMS, 2020, 11260
  • [44] Ion implantation process and lattice damage mechanism of boron doped crystalline germanium
    Habiba, Um E.
    Chen, Tian-Ye
    Liu, Chi-Xian
    Dou, Wei
    Liu, Xiao-Yan
    Ling, Jing-Wei
    Pan, Chang-Yi
    Wang, Peng
    Deng, Hui-Yong
    Shen, Hong
    Dai, Ning
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 2024, 43 (06) : 749 - 754
  • [45] Transport investigation of low-nitrogen-doped 6H-SiC ion-implantation vs. in situ doping
    Terziyska, P
    Pernot, J
    Contreras, S
    Robert, JL
    Di Cioccio, L
    Billon, T
    SILICON CARBIDE AND RELATED MATERIALS - 2002, 2002, 433-4 : 399 - 402
  • [46] Novel Codoping Moiety to Achieve Enhanced P-Type Doping in GaN by Ion Implantation
    Jacobs, Alan G.
    Spencer, Joseph A.
    Hite, Jennifer K.
    Hobart, Karl D.
    Anderson, Travis J.
    Feigelson, Boris N.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2023, 220 (16):
  • [47] New near-infrared defect luminescence in GaN doped with vanadium by ion implantation
    Kaufmann, B
    Dornen, A
    Harle, V
    Bolay, H
    Scholz, F
    Pensl, G
    APPLIED PHYSICS LETTERS, 1996, 68 (02) : 203 - 204
  • [48] Effects of ion implantation on yellow luminescence in unintentional doped n-type GaN
    Zhang, Limin
    Zhang, Xiaodong
    You, Wei
    Yang, Zhen
    Wang, WenXiu
    Ge, Qing
    Liu, Zhengmin
    CENTRAL EUROPEAN JOURNAL OF PHYSICS, 2008, 6 (02): : 283 - 288
  • [49] Application of lightly doped drain structure to AlGaN/GaN HEMTs by ion implantation technique
    Suita, M.
    Nanjo, T.
    Oishi, T.
    Abe, Y.
    Tokuda, Y.
    ELECTRONICS LETTERS, 2008, 44 (23) : 1378 - U58
  • [50] Comparison of Mg-based liquid metal ion sources for scalable focused-ion-implantation doping of GaN
    Titze, Michael
    Katzenmeyer, Aaron
    Frisone, Sam
    Ohlhausen, James A.
    Flores, Anthony
    Campbell, Deanna
    Li, Bingjun
    Wang, Yongqiang
    Han, Jung
    Bielejec, Edward S.
    Goldman, Rachel S.
    AIP ADVANCES, 2024, 14 (04)