Simulation and Experimental Analysis of Thermo-Mechanical Behavior of Microresonators under Dynamic Loading

被引：0
|
作者：
Pustan, Marius [1 ]
Birleanu, Corina [1 ]
Dudescu, Cristian [1 ]
机构：
[1] Tech Univ Cluj Napoca, Cluj Napoca 400641, Romania
来源：
2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2012年
关键词：
POLYSILICON;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Simulation, finite element analysis and experimental investigations of the dynamical response of a microresonator under electrostatic actuation are presented in this paper. The scope is to characterize the influence of thermo-mechanical behavior of the material on the frequency response, amplitude and velocity of oscillations under continuous actuation. The effect of thermoelastic damping on vibrating structures is experimentally investigated by measuring the loss in amplitude and velocity of oscillations as a function of time and the changes in quality factor. The tests are performed in ambient conditions and in vacuum in order to separate the extrinsic damping of beam by the intrinsic effect given by thermoelastic damping. The vibrating structure under investigations is a polysilicon clamped-clamped beam.
引用
收藏
页码：87 / 92
页数：6
相关论文
共 50 条
  • [21] Numerical stress analysis in adhesively bonded joints under thermo-mechanical loading
    Al-Ramahi, Nawres J.
    Joffe, Roberts
    Varna, Janis
    ADVANCES IN MECHANICAL ENGINEERING, 2020, 12 (10)
  • [22] A NUMERICAL AND EXPERIMENTAL ANALYSIS OF COMPRESSION-INDUCED CRACKING IN EPOXY COMPOSITE GROUT UNDER THERMO-MECHANICAL LOADING
    Waseetuddin, Nahri S.
    Abubakar, Abba A.
    Al-Athel, Khaled S.
    Akhtar, Syed S.
    PROCEEDINGS OF ASME 2023 INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, IMECE2023, VOL 11, 2023,
  • [23] Simulation of the Thermo-Mechanical Behavior and Failure of Refractory of Converter
    Chen, Xia
    Chang, Qingming
    Chen, Changjun
    Zhang, Yunxiang
    ADVANCES IN CIVIL ENGINEERING, PTS 1-6, 2011, 255-260 : 4139 - 4142
  • [24] Thermo-mechanical behavior of elastomers with dynamic covalent bonds
    Drozdov, A. D.
    Christiansen, Jesper deClaville
    INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 2020, 147 (147)
  • [25] IMPLEMENTATION OF INTERACTING CREEP AND FATIGUE UNDER THERMO-MECHANICAL LOADING
    Had, J.
    ENGINEERING MECHANICS 2017, 2017, : 362 - 365
  • [26] Defect annihilations in carbon nanotubes under thermo-mechanical loading
    Shet, C
    Chandra, N
    Namilae, S
    JOURNAL OF MATERIALS SCIENCE, 2005, 40 (01) : 27 - 36
  • [27] Defect annihilations in carbon nanotubes under thermo-mechanical loading
    C. Shet
    N. Chandra
    S. Namilae
    Journal of Materials Science, 2005, 40 : 27 - 36
  • [28] Experimental and numerical study on the thermo-mechanical behavior of granite
    Jang, MH
    Yang, HS
    Park, KO
    ENVIRONMENTAL AND SAFETY CONCERNS IN UNDERGROUND CONSTRUCTION, VOLS, 1 AND 2, 1997, : 715 - 719
  • [29] Finite element simulation of pile behaviour under thermo-mechanical loading in integral abutment bridges
    Razmi, Jafar
    Ladani, Leila
    Aggour, Sherif M.
    STRUCTURE AND INFRASTRUCTURE ENGINEERING, 2014, 10 (05) : 643 - 653
  • [30] Mixed-mode dynamic crack propagation in graded materials under thermo-mechanical loading
    Kidane, Addis
    Chalivendra, Vijaya B.
    Shukla, Arun
    Chona, Ravi
    ENGINEERING FRACTURE MECHANICS, 2010, 77 (14) : 2864 - 2880
12345