Study of the injection molding of a polarizing beam splitter

被引：12
|
作者：
de Carvalho, EJ
Braga, ED
Cescato, LH
机构：
[1] Univ Estadual Campinas, Fac Engn Electr & Comp, Dept Elect & Microelect, BR-13083970 Campinas, SP, Brazil
[2] Univ Estadual Campinas, Inst Fis Gleb Wataghin, Lab Opt, Dept Fis Mat Condensada, BR-13083970 Campinas, SP, Brazil
来源：
APPLIED OPTICS | 2006年 / 45卷 / 01期
关键词：
D O I：
10.1364/AO.45.000100
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe the replication of a relief grating that behaves like a polarizing beam splitter by injection molding. Measurements of the grating master, nickel shim, and replica, performed by atomic force microscopy, allow establishing a limit for the injection molding technique (currently used in CD fabrication) to aspect ratios of approximately 0.15. Although this limit strongly reduces the diffraction efficiency of the elements as well as their polarizing properties, extinction ratios of approximately 10:1 were measured for the replicas in a large range of wavelengths. (c) 2006 Optical Society of America.
引用
收藏
页码：100 / 103
页数：4
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