Long-term testing of hermetic anodically bonded glass-silicon packages

This paper reviews long-term test results obtained from a series of tests on glass-Si hermetically sealed packages. Results are presented from: 1) a 6.7-year ongoing room temperature phosphate buffered saline (PBS) soak test of 4 packages. 2) a 2.3-year ongoing in-vitro 97degreesC PBS soak test of a single package; and 3) in-situ hermeticity and biocompatibility tests from 12 packages implanted in 4 guinea pigs - 3 packages implanted in each of 2 guinea pigs for I-month and another 2 guinea pigs for 19-months, and 22-months. The long-term room temperature soak test is the longest running of any micropackage reported to date.