Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor

被引：12
|
作者：
Moon, S. E. [1 ]
Kim, E. -K. [1 ]
Lee, H. -Y. [1 ]
Lee, J. -W. [1 ]
Park, J. [1 ]
Park, S. -J. [1 ]
Kwak, J. -H. [1 ]
Park, K. -H. [1 ]
Kim, J. [1 ]
Jo, G. -H. [2 ]
Lee, T. -H. [2 ]
机构：
[1] Elect & Telecommun Res Inst, Taejon 305350, South Korea
[2] Gwangju Inst Sci & Technol, Dept Mat Sci Engn, Kwangju 500712, South Korea
来源：
JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2009年 / 54卷 / 02期
关键词：
In2O3; Nanowire device; NO2; Chemical sensor;
D O I：
10.3938/jkps.54.830
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor-liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by using electron beam lithography and photolithography and their current-voltage characteristics were measured after a post process to acquire reproducible devices for possible applications as a chemical gas sensor. The temperature-dependent current-voltage characteristics were measured to investigate the temperature-dependant electrical transport properties for possible applications as a chemical gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
引用
收藏
页码：830 / 834
页数：5
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