A new fabrication technique for ultra-small diffusion-cooled hot-electron bolometers

被引：1
|
作者：
Datesman, AM [1 ]
Zhang, JZ [1 ]
Lichtenberger, AW [1 ]
机构：
[1] Univ Virginia, Dept Elect Engn, Charlottesville, VA 22903 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1999年 / 9卷 / 02期
基金：
美国国家航空航天局; 美国国家科学基金会;
关键词：
D O I：
10.1109/77.783960
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Hot-electron bolometers (HEBs) are becoming the technology of choice for heterodyne mixing in the short submillimeter wavelength regime (frequencies above 1 THz). In this paper, we describe a new, versatile, easily variable method of diffusion-cooled HEB fabrication using a focused-ion beam (FIB) microscope. This technique does not require electron-beam lithography or definition of the bolometer element by liftoff.
引用
收藏
页码：4237 / 4240
页数：4
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