Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures

被引：14
|
作者：
Oks, E. [1 ]
Burdovitsin, V. [1 ]
Medovnik, A. [1 ]
Yushkov, Yu. [1 ]
机构：
[1] Tomsk State Univ Control Syst & Radioelect, Tomsk 634050, Russia
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2013年 / 84卷 / 02期
基金：
俄罗斯基础研究基金会;
关键词：
EXTRACTION; CATHODE;
D O I：
10.1063/1.4789771
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This article reports on design and application of wide-aperture pulsed beam source, based on hollow cathode discharge. The source is intended for electron beam generation in pressure range 2-15 Pa. Multi-aperture extraction system, used in a source, provided beam cross-section uniformity of 10% on diameter 40 mm. The limiting values of the current density, pulse duration, and accelerating voltage are 350 mA/cm(2), 250 mu s, and 10 kV, respectively. These parameters are sufficient for surface modification of various materials, including non-conducting matters. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4789771]
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页数：4
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