Replacement and Rearrangement of an Oxide Lattice by Germanium Doping in Solution-Processed Indium-Zinc-Oxide Thin-Film Transistors

被引:3
|
作者
Jung, Tae Soo [1 ]
Kim, Si Joon [1 ]
Kim, Chul Ho [1 ]
Jung, Joohye [1 ]
Na, Jaewon [1 ]
Sabri, Mardhiah Muhamad [1 ]
Kim, Hyun Jae [1 ]
机构
[1] Yonsei Univ, Sch Elect & Elect Engn, Seoul 120749, South Korea
基金
新加坡国家研究基金会;
关键词
Amorphous oxide semiconductor (AOS); germanium (Ge) doping; solution process; substitution process; thin-film transistors (TFTs); MOBILITY; DEFECTS;
D O I
10.1109/TED.2015.2455558
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Germanium (Ge) doping effects on solution-processed indium-zinc-oxide (IZO) thin-film transistors (TFTs) were investigated. Ge doping increased the carrier concentration of Ge-doped IZO (Ge: IZO) thin films from 3.32 x 10(14) to 3.13 x 10(15) cm(3) by Ge substitution for zinc (Zn). Ge easily substituted for Zn in the IZO active layer, due to its comparably small atomic radius. By this substitution, Ge doping provided additional valence electrons to the active layer, resulting in a value for the field-effect mobility of a Ge: IZO TFT that was almost two times greater than that of a pristine IZO TFT. Consequently, despite the Ge: IZO TFT being a quaternary system, it displayed a better electrical performance and stability at low processing temperatures, thus demonstrating the feasibility of this device for flexible displays.
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页码:2888 / 2893
页数:6
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