Thermally excited micromechanical vacuum resonator

被引：0
|
作者：
Wang, YQ [1 ]
Jin, ZH [1 ]
Wang, YL [1 ]
Ding, C [1 ]
机构：
[1] Zhejiang Univ, Dept Informat & Elect Engn, Hangzhou 310027, Peoples R China
来源：
1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS | 1998年
关键词：
D O I：
10.1109/ICSICT.1998.786540
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micromechanical resonator is proposed and realized, which is made in silicon-unitized structure. It consists of a single-crystal silicon beam and two P-type silicon resistors. One mister is used to excite the beam vibrating and the other to sense vibration of the beam. The dimension of the resonator is about 4 x 2.5 mm(2), the resonant frequency is about 7.8 KHz, Q factor about 190 in air and above 2500 in vacuum degree of 7.5 x 10(-4) Pa. The theory of thermal excitation is analyzed and the characteristics of the resonator are tested. We conclude that the resonator can be applied to vacuum measurement by the means of closed-loop resonating circuit, The design and realization of the circuit are described.
引用
收藏
页码：950 / 952
页数：3
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