Effect of Size on Average Molecular Weight of Poly (Methyl Methacrylate) Micropattern During Hot Embossing

被引：0
|
作者：
Lin, C. B. [1 ]
Chang, Zue-Chin [2 ]
Ho, Jin-Sin [1 ]
Hsiao, C. F. [1 ]
机构：
[1] Tamkang Univ Tamsui, Dept Mech & Electromech Engn, New Taipei City, Taiwan
[2] Natl Chin Yi Univ Technol, Dept Mech Engn, Taiping City, Taiwan
来源：
ADVANCED MATERIALS AND ENGINEERING MATERIALS II | 2013年 / 683卷
关键词：
hot embossing; poly (methyl methacrylate); average molecular weight; number average molecular weight; MICROLENS ARRAYS; LITHOGRAPHY; FABRICATION;
D O I：
10.4028/www.scientific.net/AMR.683.133
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Hot-embossing experiments were conducted on poly (methyl methacrylate) orthogonal arrays with base widths of 1 mu m, 3 mu m, 5 mu m, 10 mu m, and 50 mu m. The relationship between the base width with respect to average molecular weight and number average molecular weight of micropattern were also investigated. It was discovered that the average molecular weight and number average molecular weight decreased as the base width increased.
引用
收藏
页码：133 / +
页数：2
相关论文
共 50 条
  • [1] Effect of molecular weight on poly(methyl methacrylate) resolution
    Khoury, M
    Ferry, DK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01): : 75 - 79
  • [2] Fabrication of a microchannel device by hot embossing and direct bonding of poly(methyl methacrylate)
    Shinohara, Hidetoshi
    Mizuno, Jun
    Shoji, Shuichi
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (6A): : 3661 - 3664
  • [3] Fabrication of a microchannel device by hot embossing and direct bonding of poly(methyl methacrylate)
    Shinohara, Hidetoshi
    Mizuno, Jun
    Shoji, Shuichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (6 A): : 3661 - 3664
  • [4] Fabrication of poly(methyl methacrylate) (PMMA) microfluidic chips by a simple hot embossing method
    Du, XG
    Guan, YX
    Wang, FR
    Fang, ZL
    CHEMICAL JOURNAL OF CHINESE UNIVERSITIES-CHINESE, 2003, 24 (11): : 1962 - 1966
  • [5] Aging of a low molecular weight poly(methyl methacrylate)
    Casalini, R.
    Roland, C. M.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2011, 357 (02) : 282 - 285
  • [6] Effect of molecular weight on enthalpy relaxation in syndiotactic poly(methyl-methacrylate)
    Della Sciucca, Stefania
    Penco, Maurizio
    Sartore, Luciana
    MACROMOLECULAR SYMPOSIA, 2007, 247 : 35 - 42
  • [7] Radical polymerization of methyl methacrylate in the presence of low-molecular-weight poly(methyl methacrylate)
    S. V. Kurmaz
    I. S. Kochneva
    E. O. Perepelitsina
    V. V. Ozhiganov
    M. L. Bubnova
    Russian Journal of Applied Chemistry, 2008, 81 : 1235 - 1239
  • [8] Radical polymerization of methyl methacrylate in the presence of low-molecular-weight poly(methyl methacrylate)
    Kurmaz, S. V.
    Kochneva, I. S.
    Perepelitsina, E. O.
    Ozhiganov, V. V.
    Bubnova, M. L.
    RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 2008, 81 (07) : 1235 - 1239
  • [9] Radical polymerization of methyl methacrylate in the presence of low-molecular-weight poly(methyl methacrylate)
    Kurmaz, S.V.
    Kochneva, I.S.
    Perepelitsina, E.O.
    Ozhiganov, V.V.
    Bubnova, M.L.
    Russian Journal of Applied Chemistry, 2008, 81 (07): : 1235 - 1239
  • [10] MOLECULAR-WEIGHT DEPENDENCE ON THE STEREOCOMPLEXATION OF POLY(METHYL METHACRYLATE)
    WEBSTER, GR
    WUNDER, SL
    BUESE, MA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1992, 204 : 295 - POLY
12345