Micro Vibration Measurement Sensor Based on the Tunneling Effect

Scanning tunneling microscopy is one of the surface measurement instruments in micro and nano field, and the Z-direction resolution is 0.01m. So it is easily affected by the external factor in the course of measurement. The influence of vibration has already become one of main obstacles for improving the nano measuring accuracy. In this article, micro vibration measurement based on the tunneling effect is referred. A new sensor design of double displacement stages is brought to study the micro vibration, and both stages have the nano level displacement and resolution. Using this sensor, the tunneling effect is realized and the micro vibration is measured. The experiment results show this design has stable performance, and the results can be used to be a reference for the compensation of scanning tunneling microscopy.