Multiple Cluster Tools System Modelling Using Coloured Petri Net

被引：0
|
作者：
Aized, Tauseef [1 ]
机构：
[1] Univ Engn & Technol, Dept Mech Mechatron & Mfg Engn, KSK, Lahore, Pakistan
来源：
WORLD CONGRESS ON ENGINEERING, WCE 2010, VOL III | 2010年
关键词：
multiple cluster tool system; modelling; random failure; coloured Petri net;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
multiple cluster tool system has become an important technology in semiconductor manufacturing systems with the advantages of higher yields and shorter cycle times. Modelling and simulation is a standard methodology in order to understand and predict performance of semiconductor manufacturing systems. Resources random failures during process execution are one major concern regarding system performance measured in terms of throughput and cycle time. This study aims to models and analyse random failures of processing modules of multiple cluster tool systems using coloured Petri net method.
引用
收藏
页码：2385 / 2388
页数：4
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