Field-assisted nanopatterning of metals, metal oxides and metal salts

被引:8
|
作者
Liu, Jun-Fu
Miller, Glen P. [1 ]
机构
[1] Univ New Hampshire, Dept Chem, Durham, NH 03824 USA
基金
美国国家科学基金会;
关键词
ATOMIC-FORCE MICROSCOPE; SILICON SURFACES; NANOLITHOGRAPHY; NANOFABRICATION; OXIDATION; TITANIUM; FILM; TIP; AIR;
D O I
10.1088/0957-4484/20/5/055303
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The tip-based nanofabrication method called field-assisted nanopatterning or FAN has now been extended to the transfer of metals, metal oxides and metal salts onto various receiving substrates including highly ordered pyrolytic graphite, passivated gold and indium-tin oxide. Standard atomic force microscope tips were first dip-coated using suspensions of inorganic compounds in solvent. The films prepared in this manner were non-uniform and contained inorganic nanoparticles. Tip-based nanopatterning on chosen substrates was conducted under high electric field conditions. The same tip was used for both nanofabrication and imaging. Arbitrary patterns were formed with dimensions that ranged from tens of microns to sub-20 nm and were controlled by tuning the tip bias during fabrication. Most tip-based nanopatterning techniques are limited in terms of the type of species that can be deposited and the type of substrates onto which the deposition occurs. With the successful deposition of inorganic species reported here, FAN is demonstrated to be a truly versatile tip-based nanofabrication technique that is useful for the deposition of a wide variety of both organic and inorganic species including small molecules, large molecules and polymers.
引用
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页数:6
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