High-Q vertically coupled InP microdisk resonators

被引:43
|
作者
Djordjev, K [1 ]
Choi, SJ [1 ]
Choi, SJ [1 ]
Dapkus, PD [1 ]
机构
[1] Univ So Calif, Dept Elect Engn Electrophys, Los Angeles, CA 90089 USA
关键词
demultiplexers; InGaAsP; integrated optics; microdisk resonators; microresonators; optical switches; optical waveguide filters; wavelength-division multiplexing;
D O I
10.1109/68.986803
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-quality factor vertically coupled InP microdisk resonators have been fabricated. Wafer bonding techniques have been used as a main approach to enable this three-dimensional structure. The devices exhibit smooth sidewalls, single mode operation, and high-quality factors in excess of 7000.
引用
收藏
页码:331 / 333
页数:3
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