Pulsed Radio Frequency Glow Discharge Optical Emission Spectroscopy

被引：0

作者：

Nakamura, Tatsuhito ^{[1
]}

机构：

[1] HORIBA Ltd, Sci Syst Opt Components, Chiyoda Ku, Tokyo 1010063, Japan

来源：

JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2012年 / 57卷 / 07期

关键词：

glow discharge optical emission spectroscopy; depth profile analysis; surface analysis; pulse sputtering; radio frequency; DEPTH PROFILING ANALYSIS; GDOES; FILM;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：449 / 454

页数：6

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