Pulsed Radio Frequency Glow Discharge Optical Emission Spectroscopy

被引：0
|
作者：
Nakamura, Tatsuhito [1 ]
机构：
[1] HORIBA Ltd, Sci Syst Opt Components, Chiyoda Ku, Tokyo 1010063, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2012年 / 57卷 / 07期
关键词：
glow discharge optical emission spectroscopy; depth profile analysis; surface analysis; pulse sputtering; radio frequency; DEPTH PROFILING ANALYSIS; GDOES; FILM;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：449 / 454
页数：6
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