The effect of adsorption on the electrical properties of structures based on oxidized porous silicon

被引:9
|
作者
Bilenko, DI [1 ]
Belobrovaya, OY [1 ]
Zharkova, ÉA [1 ]
Mysenko, IB [1 ]
Khasina, EI [1 ]
机构
[1] NG Chernyshevskii State Univ, Res Inst Mech & Phys, Saratov 410026, Russia
关键词
D O I
10.1134/1.1469197
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The effect of adsorption of hydrogen-sulfide and acetone polar molecules on current-voltage characteristics and time dependences of the current was studied for the <Pd-por-Si(O)-p(+)-Si-Al> structures based on oxidized porous silicon. Structures of two types were obtained-those with a Schottky barrier and those with space-charge-limited currents. The presence of a positive space charge was found near the palladium electrode; this charge defined the current-voltage characteristics in the region of V < 0.2 V and varied appreciably depending on the gas used. The parameters of the layer of oxidized porous Si and the range of operating voltages corresponding to the most marked effect of a gas were determined. A maximum current variation up to 10(3) times under the action of hydrogen sulfide with a concentration of similar to10 ppm was obtained for the structures with the Schottky barrier with a reverse voltage close to that of reversible breakdown. The results obtained are explained by the charge exchange of traps, which is corroborated by a Fermi level shift and a Schottky barrier lowering caused by the adsorption of polar molecules. (C) 2002 MAIK "Nauka / Interperiodica".
引用
收藏
页码:466 / 471
页数:6
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