Colloidal self-organization for nanoelectronics

被引：0

作者：

Dutta, J ^{[1
]}

Sugunan, A ^{[1
]}

机构：

[1] Asian Inst Technol, Sch Adv Technol, Pathum Thani 12120, Thailand

来源：

2004 IEEE International Conference on Semiconductor Electronics, Proceedings | 2004年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The major part of the expenses in modern IC manufacturing process is nowadays devoted to the R&D needed to optimize chip size, wafer size, defectivity and interconnects- building up to keep Moore's law a reality. But the question is: Can circuits with sub-0.1 mu m dimensions be fabricated by the extension of current device production technologies? An interdisciplinary 'off the beaten path' approach is mandatory to overcome future limitations. One such approach is fabrication of devices (or at least parts of devices) by self-organization.

引用

页码：A6 / A11

页数：6

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