A radiometric investigation of low-pressure rf sulfur discharges

被引:9
|
作者
Gibson, ND
Kortshagen, U
Lawler, JE
机构
[1] Physics Department, University of Wisconsin, Madison
关键词
D O I
10.1063/1.362424
中图分类号
O59 [应用物理学];
学科分类号
摘要
This investigation focuses on low-pressure S-2 molecular rf discharges for use as diffuse radiators. Cylindrical fused silica S-2-Ar and S-2-Ne lamps have been tested at 13.56 MHz and the absolute radiative efficiencies have been measured. The radiation is emitted primarily between 2800 and 3500 Angstrom. The UV radiative efficiencies were studied as a function of input power, buffer gas pressure, discharge radius, and applied external cooling. The maximum observed efficiency for a low power density, diffuse rf discharge is 7%. The measured UV efficiencies of the 13.56 MHz discharges are somewhat lower than those of low-pressure S-2-Ar de discharges. A reentrant lamp design has been tested as well and no improvements in efficiency were observed. (C) 1996 American Institute of Physics.
引用
收藏
页码:7523 / 7528
页数:6
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