A radiometric investigation of low-pressure rf sulfur discharges

被引:9
|
作者
Gibson, ND
Kortshagen, U
Lawler, JE
机构
[1] Physics Department, University of Wisconsin, Madison
关键词
D O I
10.1063/1.362424
中图分类号
O59 [应用物理学];
学科分类号
摘要
This investigation focuses on low-pressure S-2 molecular rf discharges for use as diffuse radiators. Cylindrical fused silica S-2-Ar and S-2-Ne lamps have been tested at 13.56 MHz and the absolute radiative efficiencies have been measured. The radiation is emitted primarily between 2800 and 3500 Angstrom. The UV radiative efficiencies were studied as a function of input power, buffer gas pressure, discharge radius, and applied external cooling. The maximum observed efficiency for a low power density, diffuse rf discharge is 7%. The measured UV efficiencies of the 13.56 MHz discharges are somewhat lower than those of low-pressure S-2-Ar de discharges. A reentrant lamp design has been tested as well and no improvements in efficiency were observed. (C) 1996 American Institute of Physics.
引用
收藏
页码:7523 / 7528
页数:6
相关论文
共 50 条
  • [1] MICROWAVE RADIOMETRIC INVESTIGATION OF VIBRATIONAL-RELAXATION IN LOW-PRESSURE NITROGEN DISCHARGES
    SAHNI, O
    JENNINGS, WC
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1973, 59 (11): : 6070 - 6078
  • [2] Extinction of RF capacitive low-pressure discharges
    Lisovskiy, V
    Booth, JP
    Martins, S
    Landry, K
    Douai, D
    Cassagne, V
    [J]. EUROPHYSICS LETTERS, 2005, 71 (03): : 407 - 411
  • [3] Transport of dust in low-pressure RF discharges
    Goedheer, WJ
    Akdim, MR
    Land, V
    [J]. HIGH TEMPERATURE MATERIAL PROCESSES, 2004, 8 (01): : 139 - 148
  • [4] Simulation of low-pressure rf discharges in processing of solid surfaces
    Jeltoukhine, V
    Meckeshkin-Abdullin, A
    [J]. PROGRESS IN PLASMA PROCESSING OF MATERIALS 2001, 2001, : 353 - 358
  • [5] Measurements of electron energy distribution in low-pressure RF discharges
    Godyak, V. A.
    Piejak, R. B.
    Alexandrovich, B. M.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01): : 36 - 58
  • [6] ELECTRON HEATING IN LOW-PRESSURE RF GLOW-DISCHARGES
    SURENDRA, M
    GRAVES, DB
    MOREY, IJ
    [J]. APPLIED PHYSICS LETTERS, 1990, 56 (11) : 1022 - 1024
  • [7] Radiometric and electrical characterization of low pressure dc positive column sulfur discharges
    Gibson, ND
    Lawler, JE
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (01) : 86 - 92
  • [8] Modes of rf capacitive discharge in low-pressure sulfur hexafluoride
    Lisovskiy, V.
    Booth, J-P
    Jolly, J.
    Martins, S.
    Landry, K.
    Douai, D.
    Cassagne, V.
    Yegorenkov, V.
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (22) : 6989 - 6999
  • [9] RF MODULATION OF POSITIVE-ION ENERGIES IN LOW-PRESSURE DISCHARGES
    INGRAM, SG
    BRAITHWAITE, NS
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) : 5519 - 5527
  • [10] On the role of strong turbulence in low-pressure rf discharges in a magnetic field
    Baitin, AV
    Ivanov, AA
    Serov, AA
    Sionov, AB
    [J]. JETP LETTERS, 1996, 64 (09) : 652 - 657