Identification and Quantitative Feedback Control of Precision Mechatronic Systems

被引：0

作者：

Bao, Xiulan ^{[1
]}

Luo, Xin ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

来源：

MANUFACTURING SCIENCE AND TECHNOLOGY, PTS 1-8 | 2012年 / 383-390卷

关键词：

Mechatronic systems; Quantitative feedback theory; Identification; robust control; OPTICAL LITHOGRAPHY;

D O I：

10.4028/www.scientific.net/AMR.383-390.272

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

This paper proposes a robust position controller for a precision mechatronics system, based on the quantitative feedback theory (QFT), to achieve high accuarcy and consistent tracking performance even in presence of considerable structural dynamic uncertainties and external disturbances. Tthe dynamic characteristic of precision mechatronics system is experimentally identified with close-looped identification method, taking account of system uncertainties, and then a QFT controller is designed. Simulations are carried out to validate the efficience and effectiveness of the proposed controller.

引用

页码：272 / 278

页数：7

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