Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods

被引：8

作者：

Aprilia, Lia ^{[1
,2
]}

Hosoda, Makoto ^{[3
]}

Nuryadi, Ratno ^{[4
]}

Neo, Yoichiro ^{[1
,3
]}

Barique, Mohamad Abdul ^{[3
]}

Udhiarto, Arief ^{[2
]}

Hartanto, Djoko ^{[2
]}

Mimura, Hidenori ^{[1
,3
]}

机构：

[1] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328011, Japan

[2] Univ Indonesia, Fac Engn, Dept Elect Engn, Depok 16424, West Java, Indonesia

[3] Shizuoka Univ, Res Inst Elect, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328011, Japan

[4] Agcy Assessment & Applicat Technol, Ctr Mat Technol, Puspiptek Bldg 224, South Tangerang 15314, Banten, Indonesia

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷

关键词：

SENSOR; CANTILEVER; HUMIDITY; LAYER; RODS;

D O I：

10.7567/1347-4065/ab02e4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A microcantilever (MC) coated by Al-doped ZnO nanorods (AZNRs) was used for carbon monoxide (CO) detection at ambient temperature. Very high sensitivity (on the order of femtograms) was obtained, which is caused by the intense adsorption of CO molecules on the AZNR surface. After the samples had been prepared and characterized, the effects of the presence of water vapor on the CO detection were investigated. Although no response was obtained for AZNRs without the presence of water vapor (i.e. under a vacuum), high sensitivity was observed in the presence of water vapor (finite humidity). Regarding the above phenomena, we propose a model that is a replacement process of the water vapor molecules by the CO molecules on the AZNR surface and discuss it in detail. (C) 2019 The Japan Society of Applied Physics

引用

页数：5

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