Conduction mechanisms and charge trapping control in SiO2 nanoparticle MIM capacitors

被引：2
|
作者：
Bheesayagari, Chenna R. [1 ]
Pons-Nin, Joan [1 ]
Orpella, Albert [1 ]
Veliz, Bremnen [1 ]
Bermejo, Sandra [1 ]
Dominguez-Pumar, Manuel [1 ]
机构：
[1] Univ Politecn Cataluna, Micro & Nano Technol Grp, Barcelona, Spain
来源：
ELECTROCHIMICA ACTA | 2020年 / 346卷 / 346期
关键词：
MIM capacitors; Silica nanospheres; Charge control; Electrospray; Sigma-delta control; MIXED CONDUCTORS; IMPEDANCE;
D O I：
10.1016/j.electacta.2020.136202
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
The objective of this paper is to present a charge trapping control method for MIM capacitors in which the dielectric is made of electrospray-deposited silica nanoparticles. The influence of the bias voltage on the impedance spectra of the devices is analyzed, as well as the main conduction mechanisms along the structure. The control method allows to monitor and control the long term drifts in the impedance of these devices, which are a result of the applied bias voltages. (C) 2020 Elsevier Ltd. All rights reserved.
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页数：9
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