Optical investigation of stacking faults in 4H-SiC epitaxial layers: Comparison of 3C and 8H polytypes

被引:7
|
作者
Juillaguet, S. [1 ,2 ]
Robert, T. [1 ,2 ]
Camassel, J. [1 ,2 ]
机构
[1] Univ Montpellier 2, Etud Semicond Grp, F-34095 Montpellier 5, France
[2] CNRS, Etud Semicond Grp, F-34095 Montpellier 5, France
关键词
Silicon carbide; Stacking faults; Photoluminescence; Quantum well; Electrical field; SPONTANEOUS POLARIZATION; TRANSFORMATION;
D O I
10.1016/j.mseb.2008.11.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present an analysis of the electronic structure of in-grown 3C and 8H stacking faults (SFs) in a 4H-SiC matrix. First, the concept of low-temperature photoluminescence optical signature of SFs is discussed. Then, the results of type-II quantum well (QW) model calculations are displayed, taking into account the effect of the valence band offset, internal polarization field and non-homogeneity of the potential well. In this case, we show that a satisfactory description of 3C QWs signature can be reached. The situation is entirely different for 8H. Since a 8H-unit cell is nothing but two 3C lamellae coupled by ail hexagonal turn, we investigate in detail the effect of coupling more and more two 3C lamellae until a final 8H QW is found. In this way, we show that a reasonable agreement with experimental data can be reached. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:5 / 8
页数:4
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