Electrodeposition of high-T-c superconductor material for microsensor fabrication

Thin-films of YBa2Cu3O7 (YBCO) superconductor precursor were synthesized using an electrodeposition process. The YBCO precursor thin films were deposited on Ag foils using pulsed potential deposition conditions of 10 s at -4 V and 10 s at -1 V (versus Ag reference electrode). The post-annealed films showed zero electrical resistance at 60 K. The procedures for the fabrication of a high precision micro-sensor using YBCO superconductor for measurement of weak magnetic fields are outlined. The micro-sensor templates were patterned using X-rays and precursor films were deposited into the features.