Symmetric Distortion Correction in Asphere Manufacturing

被引：1

作者：

Zhang, Jian ^{[1
]}

Dai, Lei ^{[1
]}

机构：

[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Jilin, Peoples R China

来源：

ADVANCES IN OPTICS MANUFACTURE | 2013年 / 552卷

关键词：

symmetric; distortion; correction; aspheric surface;

D O I：

10.4028/www.scientific.net/KEM.552.158

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method of symmetric distortion correction is described and successfully applied to correct the distortion mapping errors caused by CGH as well as internal imaging optics. The aspheric surface is 160 mm in diameter and has a maximum departure of 145 mu m. According to the model established by the fiducial spots on the aspheric surface, we show experimental results after direct measurement and distortion-corrected error map respectively. The results show that the method of symmetric distortion correction is useful and effective.

引用

页码：158 / 161

页数：4

共 50 条

[21] Distortion dipole effect in symmetric molecules
Kazakov, Konstantin, V
[J]. PHYSICAL REVIEW A, 2023, 108 (01)
[22] CENTRIFUGAL DISTORTION IN SYMMETRIC TOP MOLECULES
LONG, MW
[J]. JOURNAL OF CHEMICAL PHYSICS, 1960, 32 (03): : 948 - 948
[23] Constant Distortion Embeddings of Symmetric Diversities
Bryant, David
Tupper, Paul F.
[J]. ANALYSIS AND GEOMETRY IN METRIC SPACES, 2016, 4 (01): : 326 - 335
[24] Calibration of Cameras with Radially Symmetric Distortion
Tardif, Jean-Philippe
Sturm, Peter
Trudeau, Martin
Roy, Sebastien
[J]. IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE, 2009, 31 (09) : 1552 - 1566
[25] CENTRIFUGAL DISTORTION IN SYMMETRIC ROTOR MOLECULES
WILSON, EB
[J]. JOURNAL OF CHEMICAL PHYSICS, 1957, 27 (04): : 986 - 987
[26] Overlay Improvements Using a Novel High Order Distortion Correction System for NIL High Volume Manufacturing
Hiura, Mitsuru
Hayashi, Tatsuya
Kimura, Atsushi
Suzaki, Yoshio
[J]. NOVEL PATTERNING TECHNOLOGIES 2018, 2018, 10584
[27] MORE ON NONLINEAR DISTORTION CORRECTION
MACDONALD, J
[J]. IRE TRANSACTIONS ON AUDIO, 1961, AU 9 (04): : 103 - &
[28] CORRECTION OF DISTORTION IN ELECTRON MICROSCOPE
KYNASTON, D
MULVEY, T
[J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1963, 14 (04): : 199 - &
[29] Distortion Correction for an Imaging Ellipsometer
Ly, Thong Q.
Baldelli, Steven
[J]. JOURNAL OF PHYSICAL CHEMISTRY A, 2020, 124 (13): : 2708 - 2713
[30] Distortion correction for digital cameras
Lin, YC
Fuh, CS
[J]. SIBGRAPI '98 - INTERNATIONAL SYMPOSIUM ON COMPUTER GRAPHICS, IMAGE PROCESSING, AND VISION, PROCEEDINGS, 1998, : 396 - 401

← 1 2 3 4 5 →