Zinc diffusion enhanced Ga diffusion in GaAs isotope heterostructures

被引:10
|
作者
Bracht, H
Norseng, MS
Haller, EE
Eberl, K
机构
[1] Univ Munster, Inst Materialphys, D-48149 Munster, Germany
[2] Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Berkeley, CA 94720 USA
[4] Max Planck Inst Festkorperforschung, D-70569 Stuttgart, Germany
基金
美国国家科学基金会;
关键词
gallium arsenide isotope structure; gallium self-diffusion; zinc diffusion; zinc-induced interdiffusion;
D O I
10.1016/S0921-4526(01)00817-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We have investigated the simultaneous diffusion of Zn and Ga in a (69)GaAS/(71)GaAs isotope multilayer structure at temperatures between 618degreesC and 714degreesC. Diffusion profiles of Zn, (69)Ga, and (71)Ga were measured with secondary ion mass spectrometry. Accurate modeling of the simultaneous diffusion of Zn and Ga is achieved on the basis of a Ga vacancy and Ga interstitial controlled mode of Zn diffusion. This result is at variance with the generally accepted model of Zn diffusion via Ga self-interstitials. We discuss the consequences of our approach against the background of Zn and Cd diffusion experiments performed earlier. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:831 / 834
页数:4
相关论文
共 50 条
  • [21] Recombination model of the diffusion of zinc in GaAs
    Grigorev, NN
    Kudykina, TA
    SEMICONDUCTORS, 1997, 31 (06) : 595 - 599
  • [22] Diffusion modeling of zinc implanted into GaAs
    Chase, MP
    Deal, MD
    Plummer, JD
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (04) : 1670 - 1676
  • [23] Dopant diffusion and segregation in semiconductor heterostructures: Part III, diffusion of Si into GaAs
    Chen, CH
    Gosele, UM
    Tan, TY
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (03): : 313 - 321
  • [24] Self-diffusion in 69Ga121Sb/71Ga123Sb isotope heterostructures
    Bracht, H
    Nicols, SP
    Haller, EE
    Silveira, JP
    Briones, F
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (10) : 5393 - 5399
  • [25] Nitrogen effusion and self-diffusion in Ga14N/Ga15N isotope heterostructures
    Ambacher, O.
    Freudenberg, F.
    Dimitrov, R.
    Angerer, H.
    Stutzmann, M.
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (5 A): : 2416 - 2421
  • [26] Nitrogen effusion and self-diffusion in Ga14N/Ga15N isotope heterostructures
    Ambacher, O
    Freudenberg, F
    Dimitrov, R
    Angerer, H
    Stutzmann, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1998, 37 (5A): : 2416 - 2421
  • [27] ANISOTROPIC ISOTOPE EFFECT FOR DIFFUSION OF ZINC AND CADMIUM IN ZINC
    BATRA, AP
    PHYSICAL REVIEW, 1967, 159 (03): : 487 - &
  • [28] MICROSCOPIC THEORY OF DIFFUSION ON THE GA SUBLATTICE OF GAAS - VACANCY-ASSISTED DIFFUSION OF SI AND GA
    DABROWSKI, J
    NORTHRUP, JE
    PHYSICAL REVIEW B, 1994, 49 (20): : 14286 - 14289
  • [29] Experimental investigation and modeling of diffusion in the InP/(In,Ga)As heterostructures
    Bursik, J
    Malakhov, DV
    Wang, YJ
    Weatherly, GC
    Purdy, GR
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (12) : 9613 - 9621
  • [30] Diffusion of Cd in GaAs and its correlation with self-diffusion on the Ga sublattice
    Bösker, G
    Stolwijk, NA
    Mehrer, H
    Södervall, U
    Jäger, W
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (02) : 791 - 799