Generation of interference patterns of evanescent electromagnetic waves at Fabry-Perot resonances of 1D photonic crystal modes

被引:2
|
作者
Kadomina, E. A. [1 ]
Bezus, E. A. [1 ]
Doskolovich, L. L. [1 ]
机构
[1] Russian Acad Sci, Image Proc Syst Inst, Branch Fed Sci Res Ctr Crystallog & Photon, 151 Molodogvardeyskaya St, Samara 443001, Russia
基金
俄罗斯基础研究基金会;
关键词
photonic crystal; Fabry-Perot resonance; interference pattern; Bloch surface wave; BLOCH SURFACE-WAVES; GRATINGS;
D O I
10.1016/j.proeng.2017.09.656
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A diffractive structure for the generation of high-frequency interference patterns of evanescent electromagnetic waves based on the interference of the "volume" modes of 1D dielectric photonic crystal at Fabry-Perot resonances is proposed. The obtained results may find application in the design of novel devices for near-field interference photolithography. (C) 2017 The Authors. Published by Elsevier Ltd.
引用
收藏
页码:42 / 47
页数:6
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