A vibration isolation platform

被引:18
|
作者
Trumper, DL [1 ]
Sato, T [1 ]
机构
[1] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
关键词
D O I
10.1016/S0957-4158(01)00068-X
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper describes one of the projects for the undergraduate course 2.737 Mechatronics in the Mechanical Engineering Department at MIT. This project uses an 8-inch audio speaker as the basis for a one-axis vibration isolation platform. This system is intended to isolate the platform from base vibrations and also to stabilize the platform with respect to oil-board generated disturbances. This function is similar to that required for isolating precision machines such as wafer steppers and coordinate measuring machines. This project provides a context for students to deepen their understanding of frequency-domain feedback design techniques and implementation issues. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:281 / 294
页数:14
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