Measurement of the roughness parameters with the use of an interference microscope

被引：1
|
作者：
Moiseev, N. N. [1 ]
Tselmina, I. Yu. [2 ]
机构：
[1] All Russia Res Inst Optophys Measurements VNIIOFI, Moscow, Russia
[2] Ramenskoe Instrument Construct Factory, Ramenskoye, Russia
来源：
MEASUREMENT TECHNIQUES | 2012年 / 55卷 / 09期
关键词：
Linnik interference microscope; phase steps methods; roughness; laser mirror;
D O I：
10.1007/s11018-012-0087-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A technique for the measurement of the roughness parameters of a polished surface in the nanometric range (nano-roughness) by means of a Linnik interference microscope with computer-aided interpretation of the interference patterns using the phase steps method is considered.
引用
收藏
页码：990 / 994
页数：5
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