Electron ejection from MgO thin films by low energy noble gas ions: Energy dependence and initial instability of the secondary electron emission coefficient

被引：66
|
作者：
Moon, KS [1 ]
Lee, JW [1 ]
Whang, KW [1 ]
机构：
[1] Seoul Natl Univ, Div Elect Engn, Seoul 151742, South Korea
来源：
JOURNAL OF APPLIED PHYSICS | 1999年 / 86卷 / 07期
关键词：
D O I：
10.1063/1.371328
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Low energy ion-induced secondary electron emission from the surface of thin (500-5000 Angstrom) polycrystalline MgO films has been investigated with various noble gas ions at energies ranging from 45 to 300 eV. The dependence of secondary electron emission coefficient gamma(i) on the type and energy of ions is reported and interpreted in terms of electron ejection mechanisms. As-deposited MgO films showed an initial fluctuation in the secondary emission current, which upon annealing or after a certain ion bombardment time irreversibly disappeared. (C) 1999 American Institute of Physics. [S0021-8979(99)04719-2].
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收藏
页码：4049 / 4051
页数：3
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