Spray-pyrolysis deposition of LaMnO3 and La1-xCaxMnO3 thin films

被引:12
|
作者
Todorovska, R
Petrova, N
Todorovsky, D
Groudeva-Zotova, S
机构
[1] Univ Sofia, Fac Chem, Sofia 1164, Bulgaria
[2] Bulgarian Acad Sci, Inst Elect, Sofia 1784, Bulgaria
[3] Leibniz Inst Solid State & Mat, D-01069 Dresden, Germany
关键词
rare earths; manganites; thin layers; spray-pyrolysis; citric complexes;
D O I
10.1016/j.apsusc.2005.04.052
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Ethylene glycol solutions of La-Mn(II) and La-Ca-Mn(II) citric complexes has been used as a starting material for spray-pyrolysis deposition of LaMnO3 and La1-xCaxMnO3 thin films on beta-quartz, fused quartz, Si(0 0 1) and SrTiO3(1 0 0) substrates heated during the deposition at 380 T. At suitable post-deposition heating conditions highly uniform films, 0.1-1 mu m in thickness, with good crystal structure were obtained. Highly textured LaMnO3 films are obtained on SrTiO3(1 0 0) substrate. Interaction between the layer and Si-containing Substrates is observed during the post-deposition heating in static air. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:3441 / 3448
页数:8
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