Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

被引：2

作者：

Zhang, Zecen ^{[1
]}

Ng, Geok Ing ^{[1
]}

Hu, Ting ^{[1
]}

Qiu, Haodong ^{[1
]}

Guo, Xin ^{[1
]}

Wang, Wanjun ^{[1
]}

Rouifed, Mohamed S. ^{[1
]}

Liu, Chongyang ^{[1
]}

Sia, Jiaxu ^{[1
]}

Zhou, Jin ^{[1
]}

Wang, Hong ^{[1
]}

机构：

[1] Nanyang Technol Univ, NOVITAS, Nanoelect Ctr Excellence, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

4TH ANNUAL INTERNATIONAL CONFERENCE ON WIRELESS COMMUNICATION AND SENSOR NETWORK (WCSN 2017) | 2018年 / 17卷

关键词：

SILICON-ON-INSULATOR; RING-RESONATOR; WAVE-GUIDE;

D O I：

10.1051/itmconf/20181702005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A one-time etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on commercial 340 nm thick-top-silicon silicon-on-insulator (SOI) platform for mid-infrared (MIR) bio-chemical sensing applications. The suspended structure can offer a larger exposed area of waveguides with the testing chemicals as well as a decent sensitivity. And the one-time etching process also eases the fabrication. The suspended waveguide is optimized with a balance between propagation loss and the sensitivity. The suspended microracetrack resonator is experimentally measured at 2 mu m wavelength and well fitted with an extinction ratio (ER) of 12.3 dB and a full-width-at-half-maximum (FWHM) of 0.12 nm, which corresponds to a quality factor (Q factor) of 16600. With the equivalent refractive index method and a specially developed numerical model, the expected sensitivities of fundamental TE and TM mode were calculated as 58 nm/RIU and 303 nm/RIU respectively. This one-time etching suspended microracetrack resonator shows great potential in MIR optical bio-chemical sensing applications.

引用

页数：7

共 26 条

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