Light absorption by an atomic force microscope probe

被引:0
|
作者
Sharov, V. A. [1 ]
Dunaevskiy, M. S. [1 ,2 ]
Kryzhanovskaya, N. V. [3 ]
Polubavkina, Yu S. [3 ]
Alekseev, P. A. [1 ]
机构
[1] Ioffe Inst, 26 Politekhn Skaya Str, St Petersburg 194021, Russia
[2] ITMO Univ, 49 Kronverksky Pr, St Petersburg 197101, Russia
[3] St Petersburg Natl Res Acad Univ, RAS, 8 Khlopina Str, St Petersburg 194021, Russia
关键词
RESOLUTION;
D O I
10.1088/1742-6596/816/1/012036
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper a probe of an atomic force microscope (AFM) served as a detector of optical radiation. We investigated absorption of optical radiation in the visible range by commercially available Si and Si3N4 probes. It has been shown that the radiation in the far field is mainly absorbed in the probe tip. By scanning a laser beam with a diameter of similar to 0.7 microns by the AFM probe, a lateral resolution of similar to 1.5 microns was demonstrated. Numerical modeling of evanescent wave absorption by AFM probes showed enhancement of the absorption in the probes as compared with a flat surface. A Si3N4 probe more effectively absorbs the evanescent radiation.
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页数:5
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